Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials

1.
Department of Materials Science & Engineering, University of Maryland, College Park, MD, USA
2.
Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD, USA
3.
Research Center for Intelligent Optoelectronic Computing, Zhejiang Lab, 311121, Hangzhou, China
4.
Department of Materials Science & Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
5.
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA, USA
6.
The College of Optics & Photonics, CREOL, University of Central Florida, Orlando, FL, USA
7.
Department of Materials Science and Engineering, University of Central Florida, Orlando, FL, USA
8.
Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA

Funds: The authors acknowledge fabrication facility support by the MIT Microsystems Technology Laboratories, the Materials Research Laboratory, and the Lincoln Laboratory Microelectronic Laboratory.

摘要

Abstract: Optical phase shifters constitute the fundamental building blocks that enable programmable photonic integrated circuits (PICs)—the cornerstone of on-chip classical and quantum optical technologies [1, 2]. Thus far, carrier modulation and thermo-optical effect are the chosen phenomena for ultrafast and low-loss phase shifters, respectively; however, the state and information they carry are lost once the power is turned off—they are volatile. The volatility not only compromises energy efficiency due to their demand for constant power supply, but also precludes them from emerging applications such as in-memory computing. To circumvent this limitation, we introduce a phase shifting mechanism that exploits the nonvolatile refractive index modulation upon structural phase transition of Sb₂Se₃, a bi-state transparent phase change material (PCM). A zero-static power and electrically-driven phase shifter is realized on a CMOS-backend silicon-on-insulator platform, featuring record phase modulation up to 0.09 π/µm and a low insertion loss of 0.3 dB/π, which can be further improved upon streamlined design. Furthermore, we demonstrate phase and extinction ratio trimming of ring resonators and pioneer a one-step partial amorphization scheme to enhance speed and energy efficiency of PCM devices. A diverse cohort of programmable photonic devices is demonstrated based on the ultra-compact PCM phase shifter.

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参考文献(58)

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doi: 10.1186/s43074-022-00070-4

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Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials

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doi: 10.1186/s43074-022-00070-4

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Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials

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PhotoniX

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