Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

1.
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, 130012, China
2.
Centre for Micro-Photonics, Faculty of Science, Engineering and Technology, Swinburne University of Technology, Hawthorn, VIC, 3122, Australia
3.
Melbourne Centre for Nanofabrication, ANFF, 151 Wellington Road, Clayton, VIC, 3168, Australia
4.
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Haidian, Beijing, 100084, China

Funds: This work was supported by the National Natural Science Foundation of China (NSFC, Grant Nos. 61825502, 61960206003, 61935008 and 62105117) and the Scientific Research Project of the Education Department of Jilin Province (JJKH20221005KJ).

摘要

- /
- /
- /
- /
Abstract: Femtosecond laser machining of biomimetic micro/nanostructures with high aspect ratio (larger than 10) on ultrahard materials, such as sapphire, is a challenging task, because the uncontrollable surface damage usually results in poor surface structures, especially for deep scribing. Here, we report an inside-out femtosecond laser deep scribing technology in combination with etching process for fabricating bio-inspired micro/nanostructures with high-aspect-ratio on sapphire. To effectively avoid the uncontrollable damage at the solid/air interface, a sacrificial layer of silicon oxide was employed for surface protection. High-quality microstructures with an aspect ratio as high as 80:1 have been fabricated on sapphire surface. As a proof-of-concept application, we produced a moth-eye inspired antireflective window with sub-wavelength pyramid arrays on sapphire surface, by which broadband (3–5 μm) and high transmittance (98% at 4 μm, the best results reported so far) have been achieved. The sacrificial layer assisted inside-out femtosecond laser deep scribing technology is effective and universal, holding great promise for producing micro/nanostructured optical devices.
- Femtosecond laser /
- Etching /
- Antireflection /
- Biomimetic microstructures /
- Sapphire

HTML全文

参考文献(41)

[1]	Sakakura M, Lei Y, Wang L, Yu YH, Kazansky PG. Ultralow-loss geometric phase and polarization shaping by ultrafast laser writing in silica glass. Light Sci. Appl. 2020;9:15.
[2]	Gissibl T, Schmid M, Giessen H. Spatial beam intensity shaping using phase masks on single-mode optical fibers fabricated by femtosecond direct laser writing. Optica. 2016;3(4):448–51.
[3]	Liu X-Q, Yu L, Yang S-N, Chen Q-D, Wang L, Juodkazis S, et al. Optical nanofabrication of concave microlens arrays. Laser Photonics Rev. 2019;13(5):1800272.
[4]	Yan L, Yang D, Gong Q, Li Y. Rapid fabrication of continuous surface Fresnel microlens array by femtosecond laser focal field engineering. Micromachines. 2020;11(2):112.
[5]	Wang H, Zhang Y-L, Han D-D, Wang W, Sun H-B. Laser fabrication of modular superhydrophobic chips for reconfigurable assembly and self-propelled droplet manipulation. PhotoniX. 2021;2(1):1–13.
[6]	Jiang L, Wang AD, Li B, Cui TH, Lu YF. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application. Light Sci Appl. 2018;7(2):17134.
[7]	Juodkazis S, Nishimura K, Misawa H, Ebisui T, Waki R, Matsuo S, et al. Control over the crystalline state of sapphire. Adv. Mater. 2006;18(11):1361–4.
[8]	Li Z-Z, Wang L, Fan H, Yu Y-H, Sun H-B, Juodkazis S, et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment. Light Sci. Appl. 2020;9(1):1–7.
[9]	Xu SZ, Sun K, Yao CZ, Liu H, Miao XX, Jiang YL, et al. Periodic surface structures on dielectrics upon femtosecond laser pulses irradiation. Opt. Express. 2019;27(6):8983–93.
[10]	Wang L, Xu B-B, Cao X-W, Li Q-K, Tian W-J, Chen Q-D, et al. Competition between subwavelength and deep-subwavelength structures ablated by ultrashort laser pulses. Optica. 2017;4(6):637–42.
[11]	Li X, Guan Y. Theoretical fundamentals of short pulse laser–metal interaction: A review. Nanotechnol Precis Eng. 2020;3(3):105–25.
[12]	Hu Y, Rao S, Wu S, Wei P, Qiu W, Wu D, et al. All-glass 3D optofluidic microchip with built-in tunable microlens fabricated by femtosecond laser-assisted etching. Adv. Opt. Mater. 2018;6(9):1701299.
[13]	Sugioka K, Cheng Y. Ultrafast lasers—reliable tools for advanced materials processing. Light: Sci Appl. 2014;3(4):e149.
[14]	Liu X-Q, Chen Q-D, Guan K-M, Ma Z-C, Yu Y-H, Li Q-K, et al. Dry-etching-assisted femtosecond laser machining. Laser Photonics Rev. 2017;11(3):1600115.
[15]	Liu X-Q, Yang S-N, Yu L, Chen Q-D, Zhang Y-L, Sun H-B. Rapid engraving of artificial compound eyes from curved sapphire substrate. Adv. Funct. Mater. 2019;29(18):1900037.
[16]	Deng Z, Chen F, Yang Q, Bian H, Du G, Yong J, et al. Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging. Adv. Funct. Mater. 2016;26(12):1995–2001.
[17]	Wang C, Yang L, Zhang C, Rao S, Wang Y, Wu S, et al. Multilayered skyscraper microchips fabricated by hybrid “all-in-one” femtosecond laser processing. Microsyst. Nanoeng. 2019;5(1):1–10.
[18]	Lapointe J, Bérubé JP, Ledemi Y, Dupont A, Fortin V, Messaddeq Y, et al. Nonlinear increase, invisibility, and sign inversion of a localized fs-laser-induced refractive index change in crystals and glasses. Light Sci. Appl. 2020;9(1):1–12.
[19]	Lin J, Yu S, Ma Y, Fang W, He F, Qiao L, et al. On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing. Opt. Express. 2012;20(9):10212–7.
[20]	Bérubé J-P, Vallée R. Femtosecond laser direct inscription of surface skimming waveguides in bulk glass. Opt. Lett. 2016;41(13):3074–7.
[21]	Bérubé J-P, Frayssinous C, Lapointe J, Dupont A, Vallée R. Direct inscription of near-surface waveguides in crystals, glasses, and polymers (Conference Presentation), Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX. Int Soc Optics Photonics. 2020;11270:112700R.
[22]	Schubert M, Tiwald TE, Herzinger CM. Infrared dielectric anisotropy and phonon modes of sapphire. Phys Rev B. 2000;61(12):8187.
[23]	Harris DC, Johnson LF, Seaver R, Lewis T, Turri G, Bass M, et al. Optical and thermal properties of spinel with revised (increased) absorption at 4 to 5 μm wavelengths and comparison with sapphire. Opt Eng. 2013;52(8):087113.
[24]	Clapham PB, Hutley MC. Reduction of lens reflexion by the “Moth Eye” principle. Nature. 1973;244(5414):281–2.
[25]	Vukusic P, Sambles JR. Photonic structures in biology. Nature. 2003;424(6950):852–5.
[26]	Zhang G, Zhang J, Xie G, Liu Z, Shao H. Cicada wings: a stamp from nature for nanoimprint lithography. Small. 2006;2(12):1440–3.
[27]	Huang YF, Chattopadhyay S, Jen YJ, Peng CY, Liu TA, Hsu YK, et al. Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures. Nat Nanotec. 2007;2(12):770–4.
[28]	Min WL, Jiang B, Jiang P. Bioinspired self-cleaning antireflection coatings. Adv Mater. 2008;20(20):3914–8.
[29]	Rahman A, Ashraf A, Xin H, Tong X, Sutter P, Eisaman MD, et al. Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells. Nat Commun. 2015;6(1):1–6.
[30]	Wang L, Xu B-B, Chen Q-D, Ma Z-C, Zhang R, Liu Q-X, et al. Maskless laser tailoring of conical pillar arrays for antireflective biomimetic surfaces. Opt Lett. 2011;36(17):3305–7.
[31]	Sun CH, Min WL, Linn NC, Jiang P, Jiang B. Templated fabrication of large area subwavelength antireflection gratings on silicon. Appl Phys Lett. 2007;91(23):231105.
[32]	Zhao Y, Wang J, Mao G. Colloidal subwavelength nanostructures for antireflection optical coatings. Opt Lett. 2005;30(14):1885–7.
[33]	Wang S, Yu XZ, Fan HT. Simple lithographic approach for subwavelength structure antireflection. Appl Phys Lett. 2007;91(6):061105.
[34]	Liao Y, Pan W, Cui Y, Qiao L, Bellouard Y, Sugioka K, et al. Formation of in-volume nanogratings with sub-100-nm periods in glass by femtosecond laser irradiation. Opt Lett. 2015;40(15):3623–6.
[35]	Li X, Hu XK, Li YF, Chai L. A three-step procedure for the design of broadband terahertz antireflection structures based on a subwavelength pyramidal-frustum grating. J Lightwave Technol. 2013;32(8):1463–71.
[36]	Mazilu M, Juodkazis S, Ebisui T, Matsuo S, Misawa H. Structural characterization of shock-affected sapphire. Applied Physics A. 2007;86(2):197–200.
[37]	Hörstmann-Jungemann M, Gottmann J, Keggenhoff M. 3D-Microstructuring of Sapphire using fs-Laser Irradiation and Selective Etching. J Laser Micro/Nanoengineering. 2010;5(2):145–9.
[38]	Liu H, Li Y, Lin W, Hong M. High-aspect-ratio crack-free microstructures fabrication on sapphire by femtosecond laser ablation. Optics Laser Technology. 2020;132:106472.
[39]	Raguin DH, Morris GM. Antireflection structured surfaces for the infrared spectral region. Appl Opt. 1993;32(7):1154–67.
[40]	Zou X, Zheng G, Yuan Q, Zang W, Chen R, Li T, et al. Imaging based on metalenses. PhotoniX. 2020;1(1):1–24.
[41]	Ding X, Wang Z, Hu G, Liu J, Zhang K, Li H, et al. Metasurface holographic image projection based on mathematical properties of Fourier transform. PhotoniX. 2020;1(1):1–12.

施引文献

资源附件(0)

点击查看大图

计量

文章访问数: 117
HTML全文浏览量: 0
PDF下载量: 0
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

留言板

doi: 10.1186/s43074-022-00047-3

计量

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

计量

目录

PhotoniX

联系我们

友情链接

留言板

doi: 10.1186/s43074-022-00047-3

计量

出版历程

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

计量

出版历程

目录

PhotoniX

联系我们

友情链接