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A brief review of the technological advancements of phase measuring deflectometry

Yongjia Xu,  Feng Gao,  Xiangqian Jiang

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Yongjia Xu, Feng Gao, Xiangqian Jiang. A brief review of the technological advancements of phase measuring deflectometry[J]. PhotoniX. doi: 10.1186/s43074-020-00015-9
引用本文: Yongjia Xu, Feng Gao, Xiangqian Jiang. A brief review of the technological advancements of phase measuring deflectometry[J]. PhotoniX. doi: 10.1186/s43074-020-00015-9
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Yongjia Xu, Feng Gao, Xiangqian Jiang. A brief review of the technological advancements of phase measuring deflectometry[J]. PhotoniX. doi: 10.1186/s43074-020-00015-9
Citation: Yongjia Xu, Feng Gao, Xiangqian Jiang. A brief review of the technological advancements of phase measuring deflectometry[J]. PhotoniX. doi: 10.1186/s43074-020-00015-9
shu

A brief review of the technological advancements of phase measuring deflectometry

doi: 10.1186/s43074-020-00015-9
基金项目: 

The research is funded by the Engineering and Physical Sciences Research Council (EPSRC) of the UK with the funding of the EPSRC Centre for Innovative Manufacturing in Advanced Metrology (Grand Ref:EP/I033424/1), and the EPSRC Future Advanced Metrology Hub (EP/P006930/1).

A brief review of the technological advancements of phase measuring deflectometry

  • EPSRC Future Metrology Hub, University of Huddersfield, Huddersfield, HD1 3DH, UK

Funds: 

The research is funded by the Engineering and Physical Sciences Research Council (EPSRC) of the UK with the funding of the EPSRC Centre for Innovative Manufacturing in Advanced Metrology (Grand Ref:EP/I033424/1), and the EPSRC Future Advanced Metrology Hub (EP/P006930/1).

    摘要
  • 摘要: This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.
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    Abstract: This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.
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出版历程
  • 收稿日期:  2020-03-10
  • 录用日期:  2020-05-29
  • 网络出版日期:  2020-06-05

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